2011년 2010년 2009년 2008년 2007년 2006년 2005년 2004년 2003년 2002년 2001년 2000년 1999년
2011
Advancements in PVD Power Delivery Management
Inter PV, February 2011
2010
Electrically stable
Solar PV Management, 2010
Inverter Cost Analysis: The Right Metrics For Improved Payback
Solar Industry, July 2010
Commercial Grid-Direct PV System
SolarPro, April/May 2010
Multi-megawatt systems in North America
Photon International, February 2010
2009년
Transformerless inverters maximize power, reduce system complexity HTML version
Photovoltaics World, July 2009
복잡성을 줄이고 전력 공급을 극대화하는 트랜스리스 인버터 (Transformerless Inverter) English
Inter PV, July 2009
2008년
Optimising performance by integrating RF power and match technologies
Euro Asia Semiconductor, December 2007/January 2008
Considerations in the Selection of Vapor Delivery Subsystems
Gases & Instrumentation, March/April 2008
2007년
MFC design for semiconductor process using computational fluid dynamics
Solid State Technology, November 2007
Arc Reduction in Magnetron Sputtering of Metallic Materials
Vacuum & Coating Technology, October 2007
2006년
Managing Arcs in RF Powered Plasma ProcessesVacuum & Coating Technology, December 2006
Active Rectifier Inner Current Loop without Reference Frame Transformations in FeedbackIEEE, October 2006
Traditional Chinese version of AE Celebrates Its 25-Year Anniversary With New Product Launches
Solid State Technology, October 2006
Effective Control for Reactive Sputtering Processes
Vacuum & Coating Technology, April 2006
Beyond Pressure Transients: Using Pressure-Insensitive MFCs to Control Gases In Semiconductor Manufacturing
Semiconductor Manufacturing, March 2006
2005년
Power Conversion and Control Reduces CoO and Improves Yield
Semiconductor International, March 2005
Powering to Better Yields
European Semiconductor, November 2005
2004년
A Novel Pulsed Supply With Arc Handling and Leading Edge Control
Society of Vacuum Coaters Inc., April 2004
High Power Pulse Reactive Sputtering of TiO2
Society of Vacuum Coaters Inc., April 2004
High Power Pulsed Reactive Sputtering of Zirconium Oxide and Tantalum Oxide
Society of Vacuum Coaters Inc., April 2004
Reactive Sputter Deposition of Aluminum Oxide Coatings
Society of Vacuum Coaters Inc., April 2004
Effective Closed-Loop Control for Reactive Sputtering Using Two Reactive Gases
Society of Vacuum Coaters Inc., April 2004
Stabilizing RF Generator and Plasma Interactions
Society of Vacuum Coaters, April 2004
Maximizing Tool Uptime and Process Stability Through an RF System Upgrade
MICRO, October/November 2004
Fabs Can Ride Through Voltage Sags with Power-Quality Targets
Solid State Technology, July 2004
A Novel Frequency-Domain Small-Signal Analysis of Resonant Power Converters
IEEE Transactions on Circuits and Systems, July 2004
Partial Pressure Control in Reactive Sputtering
Hidden Analytical Ltd., June 2004
2003년
Control of the Reactive Sputtering Process Using Two Reactive Gases
Society of Vacuum Coaters Inc., May 2003
Carbon Thin Film Deposition Using High Power Pulsed Magnetron Sputtering
Society of Vacuum Coaters Inc., May 2003
Power System Requirements for Enhanced Mid-Frequency Process Stability
Society of Vacuum Coaters Inc., May 2003
Mid-Frequency Dual Magnetron Reactive Co-Sputtering for Deposition of Customized Index Optical Films
Society of Vacuum Coaters Inc., May 2003
RF-Based Sensor Technology Improves Cleaning Efficiency on PECVD Tools
Semiconductor FABTECH, 2003
Integrated Process Control for Reactive Sputter Deposition of Dielectric Thin Films
Society of Vacuum Coaters, Inc., May 2003
An Economical Method for Process Control in Pulsed-DC Magnetron Reactive Sputtering
Semiconductor Manufacturing, June 2003
Power Supplies Advance Beyond Volts and Amps
Semiconductor International, June 2003
Future Trends in Integrated Systems...Change the View
European Semiconductor, May 2003
2002년
Biased Dual Magnetron Sputter Deposition of Alumina
Society of Vacuum Coaters, Inc., April 2002
Optical Emission Studies for the Characterization of Pulsed Magnetron Sputtering Systems
Society of Vacuum Coaters, Inc., April 2002
Parameter Optimization in Pulsed DC Reactive Sputter Deposition of Aluminum Oxide
Society of Vacuum Coaters, Inc., April 2002
Reactively Sputtering High on the Transition Curve Using a Few Inexpensive Components
Society of Vacuum Coaters, Inc., April 2002
Substrate Response During Dual Bipolar Pulsed Magnetron Sputtering
Society of Vacuum Coaters, Inc., April 2002
Parameter Optimization in Pulsed DC Reactive Sputter Deposition of Aluminum Oxide
Society of Vacuum Coaters, 45th Annual Technical Conference Proceedings, 2002
DC Sputtering Cuts Deposition Times and Costs
Photonics Spectra, November 2002
Adopting E-Manufacturing in the Semiconductor Industry
MICRO, October 2002
E-Diagnostics: Moving Beyond the Data Ownership Issue
Solid State Technology, August 2002
Industry Observation: E-Manufacturing Solutions Converge
Semiconductor International, July 2002
A New Generation of Power Supplies for Large Area Dual Magnetron Sputtering
Vacuum & Coating Technology, April 2002
2001년
Can Take the Heat
European Semiconductor, July 2001
Increase Productivity Through E-Manufacturing
Semiconductor International, July 2001
Reactive Sputtering Using a Dual-Anode Magnetron System
Society of Vacuum Coaters, Inc., April 2001
Enhanced Reactively Sputtered Al2O3 Deposition by Addition of Activated Reactive Oxygen
Vacuum & Coating Technology, March 2001
Using Point-of-Use Plasma Sources to Shape a Fab's Environmental Footprint
Semiconductor Fabtech, March 2001
2000년
Single-Magnetron Approach Reactive Sputtering of Dielectrics
Vacuum & Coating Technology, September 2000
Beyond Consolidation
European Semiconductor, September 2000
Pulsed-DC Reactive Sputtering of Dielectrics: Pulsing Parameter Effects
Society of Vacuum Coaters, Inc., April 2000
1999년
Optimizing CVD Through RF Metrology
European Semiconductor, September 1999